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http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems | vi |
| dc.date.accessioned | 2018-05-24T03:09:02Z | - |
| dc.date.available | 2018-05-24T03:09:02Z | - |
| dc.date.issued | 1997 | vi |
| dc.identifier.uri | http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266 | - |
| dc.language.iso | en | vi |
| dc.publisher | National Academy Press | vi |
| dc.subject | Microelectronics | vi |
| dc.subject | Cơ điện tử | vi |
| dc.title | Microelectromechanical systems : advanced materials and fabrication methods | vi |
| dc.type | Book | vi |
| Appears in Collections: | Kỹ thuật | |
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