Please use this identifier to cite or link to this item: http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266
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dc.contributor.authorCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systemsvi
dc.date.accessioned2018-05-24T03:09:02Z-
dc.date.available2018-05-24T03:09:02Z-
dc.date.issued1997vi
dc.identifier.urihttp://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266-
dc.language.isoenvi
dc.publisherNational Academy Pressvi
dc.subjectMicroelectronicsvi
dc.subjectCơ điện tửvi
dc.titleMicroelectromechanical systems : advanced materials and fabrication methodsvi
dc.typeBookvi
Appears in Collections:Kỹ thuật

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