Please use this identifier to cite or link to this item:
http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266| Title: | Microelectromechanical systems : advanced materials and fabrication methods |
| Authors: | Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |
| Keywords: | Microelectronics Cơ điện tử |
| Issue Date: | 1997 |
| Publisher: | National Academy Press |
| URI: | http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266 |
| Appears in Collections: | Kỹ thuật |
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