Please use this identifier to cite or link to this item: http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266
Title: Microelectromechanical systems : advanced materials and fabrication methods
Authors: Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Keywords: Microelectronics
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Issue Date: 1997
Publisher: National Academy Press
URI: http://thuvien.ued.udn.vn/handle/TVDHSPDN_123456789/41266
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